Deposition process of Si–B–C ceramics from CH3SiCl3/BCl3/H2 precursor
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Thin Solid Films
سال: 2008
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2007.05.038